Manufacturer:KLA Corporation
Model:KLA 5105
Module Type:Precision Measurement Module
Measurement Range:Sub-nanometer to millimeter
Resolution:Sub-nanometer
Accuracy:+/- 0.5% of reading
Repeatability:< 0.1% of reading
Operating Temperature:-20°C to +60°C
Power Supply:100-240V AC, 50/60Hz
Dimensions:25cm x 30cm x 15cm
Weight:5kg
The KLA 5105 Precision Measurement Module is an indispensable tool for advanced metrology applications in semiconductor and microelectronics manufacturing. Its sub-nanometer resolution and high accuracy make it ideal for precise measurements critical for process control.
Designed for reliability and durability, the KLA 5105 operates efficiently across a wide temperature range, from -20°C to +60°C, ensuring consistent performance in various environments.
This module integrates seamlessly with existing systems through its versatile power supply options, supporting both 100V and 240V AC inputs at 50 or 60Hz frequencies.
With dimensions of 25cm x 30cm x 15cm and weighing just 5kg, the KLA 5105 is compact yet robust, making it easy to integrate into production lines without compromising on performance or space.
Enhanced by user-friendly interfaces and detailed documentation, the KLA 5105 simplifies setup and operation, allowing technicians and engineers to achieve optimal results quickly and efficiently.



















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