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Material:High-grade Stainless Steel
Temperature Range:-20°C to +150°C
Vacuum Compatibility:Up to 10^-4 Torr
Electrostatic Force:Adjustable up to ±1000 N
Size:200mm x 200mm x 15mm
Max Load Capacity:500g
LAM Electronics presents the state-of-the-art LAM 839-800327-315 Electrostatic Chuck, a critical tool for semiconductor production, known for its superior stability and precise control over wafer handling. Its robust design ensures minimal damage to sensitive materials, guaranteeing optimal output quality.
Crafted from premium-grade stainless steel and aluminum, this Electrostatic Chuck is engineered to withstand the rigors of continuous use without degradation. The advanced electrostatic force regulation system allows for precise manipulation of wafers, making it indispensable in high-precision applications.
Equipped with an efficient power supply compatibility feature, our Electrostatic Chuck can seamlessly integrate with various AC/DC power sources, ensuring versatile application across different manufacturing facilities. It is specifically designed to maintain vacuum levels below 10^-6 Torr, optimizing the cleanliness and integrity of the wafer surface during processing.
With compatibility for wafer sizes ranging from 100mm to 300mm, our Electrostatic Chuck offers unparalleled flexibility in semiconductor production lines. Its temperature tolerance spans from -40°C to 200°C, making it suitable for a wide range of operational conditions, from freezing to hot environments.
The LAM 839-800327-315 Electrostatic Chuck comes with an operating voltage of DC 12V and a current consumption of ≤1.5A, ensuring energy efficiency while delivering exceptional performance. This makes it an eco-friendly choice for businesses looking to reduce energy consumption without compromising on operational efficiency.
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