ZYGO ZMI-2001 ESI PCB-I-E-144 control board

ZYGO ZMI-2001 ESI PCB-I-E-144

ZYGO ZMI-2001 ESI PCB-I-E-144 Overview

The ZYGO ZMI-2001 ESI PCB-I-E-144 is a laser interferometer control board developed by ZYGO Corporation (USA) for use in semiconductor inspection and precision metrology systems. It is commonly integrated within ZMI-2001 series laser measurement systems.

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Key Features

Item	Description
Product Type	Laser system control board (Measurement Board) for high-precision displacement, surface, and profile measurement
Compatible Models	ZYGO ZMI-2001, ZMI-2002, ZMI-7705, ZMI-501, and other ZYGO control systems
Hardware Interface	Standard high-speed interface supporting up to 7.7 MHz P2 data rate, capable of driving up to 16 axes simultaneously
Expandability	Modular design allowing additional axes or peripherals through the same interface; compatible with various I/O cards
Application Fields	Semiconductor wafer inspection, photomask metrology, MEMS structure measurement, and high-precision research metrology
Main Advantages	Cost-effective, highly integrated, standardized interface, easy for secondary development and system integration
Key Part Number	PCB-I-E-144 (board model), typically referred to as “ZMI-2001 Measurement Board” in documentation

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Related Models (Within the Same Series)

• ZMI-2001 (8020-0210-01-J)
• ZMI-2002 (8020-0211-1-J)
• ZMI-4004, ZMI-4104, ZMI-501, ZMI-7705, etc.

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Usage Notes

• Power Requirements: Typically requires a 24 V DC regulated power supply, with power rating dependent on the number of axes in use.
• Heat Dissipation: The board generates heat under full load; it is recommended to use a heat sink or active cooling fan.
• Software Compatibility: Must be used with ZYGO’s official ZYGO-Control or ZYGO-Metrology software for configuration and data acquisition.
• Interface Compatibility: When used with third-party motion control cards, verify P2 interface signal levels and protocol compatibility.

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Summary

The ZYGO ZMI-2001 ESI PCB-I-E-144 is a dedicated control board designed for ZYGO’s high-precision laser measurement systems. Featuring high-speed data transmission, multi-axis control, and modular scalability, it is widely applied in semiconductor manufacturing, photolithography inspection, and scientific metrology applications.

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